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首頁(yè)> 外文會(huì)議>The 6th International Meeting on Information Display and the 5th International Display Manufacturing Conference (IMID/IDMC 2006) >Characterization of the ultra thin films of silicon oxynitride deposited byplasma-assisted N2O oxidation for thin film transistors
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Characterization of the ultra thin films of silicon oxynitride deposited byplasma-assisted N2O oxidation for thin film transistors

機(jī)譯：等離子體輔助N2O氧化沉積薄膜晶體管的氮氧化硅超薄膜的表征

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摘要

Scaling rules for TFT application devices havernled to the necessity of ultra thin dielectric filmsrnand high-k dielectric layers. In this paper, Thernadvantages of high concentration of nitrogen inrnsilicon oxide layer deposited by using N2O inrnInductively Coupled Plasma Chemical VaporrnDeposition (ICP-CVD) is investigated using X-rayrnenergy dispersive spectroscopy (EDS). We havernreported about Ellipsometric measurement,rnCapacitance - Voltage characterization andrnprocessing conditions.
機(jī)譯：TFT應(yīng)用設(shè)備的縮放規(guī)則已經(jīng)限制了超薄介電膜和高k介電層的必要性。本文利用X射線能譜儀研究了N2O電感耦合等離子體化學(xué)氣相沉積（ICP-CVD）沉積高濃度氮氧化硅層的優(yōu)勢(shì)。我們已經(jīng)報(bào)道了有關(guān)橢偏測(cè)量，電容-電壓表征和處理?xiàng)l件的報(bào)告。

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  • 會(huì)議地點(diǎn) Daegu Exhibition Convention Center (EXCO)(KR);Daegu Exhibition Convention Center (EXCO)(KR);Daegu Exhibition Convention Center (EXCO)(KR);Daegu Exhibition Convention Center (EXCO)(KR)
  • 作者單位

    School of Information and Communication engneering,Sungkyunkwan University,rnSuwon,Kyunggi-do,Republic of Korea;

    School of Information and Communication engneering,Sungkyunkwan University,rnSuwon,Kyunggi-do,Republic of Korea;

    School of Information and Communication engneering,Sungkyunkwan University,rnSuwon,Kyunggi-do,Republic of Korea;

    School of Information and Communication engneering,Sungkyunkwan University,rnSuwon,Kyunggi-do,Republic of Korea;

    School of Information and Communication engneering,Sungkyunkwan University,rnSuwon,Kyunggi-do,Republic of Korea;

    School of Information and Communication engneering,Sungkyunkwan University,rnSuwon,Kyunggi-do,Republic of Korea;

    School of Information and Communication engneering,Sungkyunkwan University,rnSuwon,Kyunggi-do,Republic of Korea;

    School of Inform;

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