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Microdevices for hearing aid applications.

機(jī)譯：用于助聽器的微型設(shè)備。

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This research develops viable MEMS (Micro-Electro-Mechanical-Systems)-based microspeakers and microphones for use in Completely-Inside-the-Canal (CIC)-type hearing aids. Precision mechanical options are provided for reducing hearing aid size, fabrication cost, and power consumption, while maintaining or improving the reliability and precision of their fit and function in the ear.;An electromagnetically actuated MEMS microspeaker has a parylene-suspended diaphragm, multi-turn and multi-layered copper coils, a NiFe core at its center, and wax-bonded Neodymium-Iron-Boron micromagnets on the back side of a silicon substrate. Flowing current in the coils and an external magnetic field allow the diaphragm to actuate vertically by Lorentz force. The soft magnet core focuses the magnetic field. The measured coil impedance of the single-turn device is as small as 1.5 ohm, which is much smaller than prior MEMS art. The device uses very little power, requiring, at maximum, tens of milliamperes: 0.5-mW power consumption when generating 90-dB SPL. The resonant frequency of the microspeakers occurs 20 kHz, far from the practical audio frequency range.;A capacitive MEMS microphone is developed using GeSe nano-electrodeposits on a microphone diaphragm to 'personalized' the fit of a hearing aid. Each microphone has a multi-layered diaphragm, top/bottom electrodes used to produce and detect capacitance change, as well as anode and cathode electrodes used to grow and retract nano-electrodeposits on the solid electrolyte layer. The diaphragm is made of parylene, including a thin, heavily Ag-doped GeSe solid electrolyte film. The electrochemically-formed silver nano-electrodeposits grow from the nickel cathode electrode toward to the silver anode electrode upon application of a DC bias. Because of mass/stress redistribution on the microphones caused by the nano-electrodeposits, the capacitive MEMS microphones' acoustic sensitivity can be tuned in-situ. Results show 1.3-dB Directivity Index (DI) improvement upon nanostructure growth, and 0.9-dB DI reversal on retraction.;Results suggest that developed microspeakers and microphones show compact, low power, and low cost, addressing significant issues associated with the manufacture, fitting, and use of hearing aids.
機(jī)譯：這項研究開發(fā)出了可行的基于MEMS（微機(jī)電系統(tǒng)）的微型揚聲器和麥克風(fēng)，用于完全在運河內(nèi)（CIC）型助聽器中。提供了精密的機(jī)械選件，以減少助聽器的尺寸，制造成本和功耗，同時保持或改善其適合耳朵和功能的可靠性和精度。電磁驅(qū)動MEMS微型揚聲器具有聚對二甲苯懸浮膜片，線圈和多層銅線圈，中心是NiFe磁芯，硅基板背面是蠟結(jié)合的釹鐵硼硼微磁鐵。線圈中流動的電流和外部磁場使隔膜在洛倫茲力的作用下垂直致動。軟磁芯聚焦磁場。單匝設(shè)備的測量線圈阻抗小至1.5歐姆，比現(xiàn)有的MEMS技術(shù)小得多。該器件消耗的功率非常小，最大需要數(shù)十毫安的電流：產(chǎn)生90dB SPL時的功耗為0.5mW。微型揚聲器的共振頻率發(fā)生在20 kHz，遠(yuǎn)離實際音頻頻率范圍。電容式MEMS麥克風(fēng)是通過在麥克風(fēng)振膜上使用GeSe納米電沉積技術(shù)開發(fā)的，以“個性化”助聽器的貼合性。每個麥克風(fēng)都有一個多層膜片，用于產(chǎn)生和檢測電容變化的頂部/底部電極，以及用于在固體電解質(zhì)層上生長和收縮納米電沉積物的陽極和陰極電極。隔膜由聚對二甲苯制成，包括一層薄的，重?fù)诫sAg的GeSe固體電解質(zhì)膜。當(dāng)施加直流偏壓時，電化學(xué)形成的銀納米電沉積物從鎳陰極電極向銀陽極電極生長。由于納米電沉積引起的麥克風(fēng)上質(zhì)量/應(yīng)力的重新分布，電容式MEMS麥克風(fēng)的聲學(xué)靈敏度可以原位調(diào)整。結(jié)果表明，納米結(jié)構(gòu)的生長會提高1.3 dB的方向性指數(shù)（DI），而縮回則表明0.9的DI反轉(zhuǎn)。結(jié)果表明，開發(fā)的微型揚聲器和麥克風(fēng)具有緊湊，低功耗和低成本的特性，解決了與制造相關(guān)的重大問題，安裝和使用助聽器。

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