国产bbaaaaa片,成年美女黄网站色视频免费,成年黄大片,а天堂中文最新一区二区三区,成人精品视频一区二区三区尤物

首頁> 外文期刊>Micromachines >Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results
【24h】

Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results

機(jī)譯：低溫中MOEMS變形鏡的操作：挑戰(zhàn)和結(jié)果

獲取原文
  • 摘要
  • 著錄項(xiàng)
  • 相似文獻(xiàn)
  • 相關(guān)主題

摘要

Micro-opto-electro-mechanical systems (MOEMS) Deformable Mirrors (DM) are key components for next generation optical instruments implementing innovative adaptive optics systems, both in existing telescopes and in the future ELTs. Characterizing these components well is critical for next generation instruments. This is done by interferometry, including surface quality measurement in static and dynamical modes, at ambient and in vacuum/cryo. We use a compact cryo-vacuum chamber designed for reaching 10?￠????6 mbar and 160 K in front of our custom Michelson interferometer, which is able to measure performance of the DM at actuator/segment level and at the entire mirror level, with a lateral resolution of 2 ???μm and a sub-nanometer z-resolution. We tested the PTT 111 DM from Iris AO: an array of single crystalline silicon hexagonal mirrors with a pitch of 606 ???μm, able to move in tip, tilt, and piston (stroke 5?￠????7 ???μm, tilt ???±5 mrad). The device could be operated successfully from ambient to 160 K. An additional, mainly focus-like, 500 nm deformation of the entire mirror is measured at 160 K; we were able to recover the best flat in cryo by correcting the focus and local tip-tilts on all segments, reaching 12 nm rms. Finally, the goal of these studies is to test DMs in cryo and vacuum conditions as well as to improve their architecture for stable operation in harsh environments.
機(jī)譯：微光電系統(tǒng)（MOEMS）變形鏡（DM）是下一代光學(xué)儀器的關(guān)鍵組件，這些光學(xué)儀器在現(xiàn)有望遠(yuǎn)鏡和未來的ELT中都實(shí)現(xiàn)了創(chuàng)新的自適應(yīng)光學(xué)系統(tǒng)。良好地表征這些組件對(duì)于下一代儀器至關(guān)重要。這是通過干涉測(cè)量法完成的，包括在環(huán)境和真空/低溫下以靜態(tài)和動(dòng)態(tài)模式進(jìn)行表面質(zhì)量測(cè)量。我們使用緊湊的低溫真空腔室，該腔室設(shè)計(jì)為在我們的定制邁克爾遜干涉儀之前達(dá)到10 ￠ 6 mbar和160 K，它能夠在執(zhí)行器/段級(jí)以及整個(gè)反射鏡上測(cè)量DM的性能。水平分辨率為2μm，亞納米z分辨率。我們測(cè)試了來自Iris AO的PTT 111 DM：間距為606μm的單晶硅六邊形反射鏡的陣列，能夠在尖端，傾斜角和活塞中移動(dòng)（行程5 ???????? 7？）。 （μm，傾斜±5mrad）。該設(shè)備可以在從環(huán)境溫度到160 K的范圍內(nèi)成功運(yùn)行。在160 K時(shí)測(cè)量了整個(gè)鏡的另外一個(gè)主要聚焦的，500 nm變形。通過校正所有段上的焦點(diǎn)和局部傾斜，我們能夠恢復(fù)到最佳的低溫平板，達(dá)到12 nm rms。最后，這些研究的目標(biāo)是在低溫和真空條件下測(cè)試DM，并改善其結(jié)構(gòu)，使其在惡劣的環(huán)境中穩(wěn)定運(yùn)行。

著錄項(xiàng)

相似文獻(xiàn)

  • 外文文獻(xiàn)
  • 中文文獻(xiàn)
  • 專利
獲取原文

客服郵箱：kefu@zhangqiaokeyan.com

京公網(wǎng)安備：11010802029741號(hào) ICP備案號(hào)：京ICP備15016152號(hào)-6 六維聯(lián)合信息科技 (北京) 有限公司?版權(quán)所有

  • 客服微信

  • 服務(wù)號(hào)