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Screen printing technique for DUV patterning of PMMA substrates

機(jī)譯：用于PMMA基板DUV圖案化的絲網(wǎng)印刷技術(shù)

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摘要

Plastics and Poly-Methyl-Methacrylate (PMMA) is becoming the choice of microfluidic components in medical diagnostic systems these days. These materials offer excellent flexibility in manufacturing processes and also make the technology economical compared to traditional glass and silicon based devices. Deep-UV exposure based PMMA microfluidic devices fabrication has been reported in the past. However it utilizes a fairly expensive metal deposition step and standard photoresist based lithographic process steps. While this demonstrates a direction toward economical processing of PMMA microfluidic parts, a more cost effective process needs to be developed to address ultra economical process for PMMA parts fabrication. In this context, this thesis proposes the utilization of the ubiquitous silk screen printing process to pattern PMMA surface for producing microfluidic components. The ink utilized in the silk screen printing process is inherently opaque to DUV. Further screen printed and dried ink is readily dissolved in isopropyl alcohol (IPA) which is the standard developing and etching solution for PMMA. These features allow us to configure a process sequence to ultra economically pattern PMMA substrates and produce microfluidic components. This thesis outlines this novel technique and also analyses the fabricated components for bio-compatibility by studying the fabricated surface using XPS.
機(jī)譯：如今，塑料和聚甲基丙烯酸甲酯（PMMA）成為醫(yī)療診斷系統(tǒng)中微流體組件的選擇。與傳統(tǒng)的玻璃和硅基設(shè)備相比，這些材料在制造過(guò)程中具有出色的靈活性，并且使該技術(shù)經(jīng)濟(jì)。過(guò)去已經(jīng)報(bào)道了基于深紫外曝光的PMMA微流體裝置的制造。然而，它利用了相當(dāng)昂貴的金屬沉積步驟和基于標(biāo)準(zhǔn)光刻膠的光刻工藝步驟。盡管這表明了向PMMA微流體零件經(jīng)濟(jì)加工的方向，但仍需要開發(fā)更具成本效益的工藝來(lái)解決PMMA零件制造的超經(jīng)濟(jì)工藝。在此背景下，本論文提出利用普適的絲網(wǎng)印刷工藝來(lái)圖案化PMMA表面以生產(chǎn)微流體組分。絲網(wǎng)印刷過(guò)程中使用的油墨對(duì)DUV本質(zhì)上是不透明的。進(jìn)一步的絲網(wǎng)印刷和干燥油墨很容易溶于異丙醇（IPA），異丙醇是PMMA的標(biāo)準(zhǔn)顯影和蝕刻溶液。這些功能使我們能夠配置工藝流程，以超經(jīng)濟(jì)地圖案化PMMA基板并生產(chǎn)微流體組件。本文概述了這一新技術(shù)，并通過(guò)研究使用XPS制作的表面來(lái)分析制作的組件的生物相容性。

著錄項(xiàng)

  • 作者

    Ahari Kaleibar Aminreza;

  • 作者單位
  • 年度 2011
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