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首頁> 外國專利> THERMAL CONDUCTIVITY ESTIMATION METHOD, THERMAL CONDUCTIVITY ESTIMATION APPARATUS, PRODUCTION METHOD FOR SEMICONDUCTOR CRYSTAL PRODUCT, THERMAL CONDUCTIVITY CALCULATOR, THERMAL CONDUCTIVITY CALCULATION PROGRAM, AND, THERMAL CONDUCTIVITY CALCULATION METHOD

THERMAL CONDUCTIVITY ESTIMATION METHOD, THERMAL CONDUCTIVITY ESTIMATION APPARATUS, PRODUCTION METHOD FOR SEMICONDUCTOR CRYSTAL PRODUCT, THERMAL CONDUCTIVITY CALCULATOR, THERMAL CONDUCTIVITY CALCULATION PROGRAM, AND, THERMAL CONDUCTIVITY CALCULATION METHOD

機(jī)譯：導(dǎo)熱估計(jì)方法，導(dǎo)熱估計(jì)裝置，半導(dǎo)體晶體產(chǎn)品的生產(chǎn)方法，導(dǎo)熱性計(jì)算器，導(dǎo)熱性計(jì)算程序，以及導(dǎo)熱性計(jì)算方法

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摘要

A thermal conductivity estimation method includes: measuring temperature distribution of a measurement sample surface in a steady state by partially heating the measurement sample under predetermined heating conditions; calculating temperature distribution of a sample model surface by performing a heat-transfer simulation on the sample model of the same shape as the measurement sample for a plurality of combinations of provisional thermal conductivities and heating conditions; making a regression model, whose input is temperature distribution of the measurement sample surface and whose output is a thermal conductivity of the measurement sample, by a machine learning technique using training data in a form of a calculation result of the plurality of combinations and the temperature distribution obtained from the plurality of combinations; and estimating the thermal conductivity of the measurement sample by inputting a measurement result of the temperature distribution of the measurement sample surface into the regression model.
機(jī)譯：導(dǎo)熱率估計(jì)方法包括：通過在預(yù)定的加熱條件下部分地加熱測(cè)量樣品，測(cè)量穩(wěn)定狀態(tài)下測(cè)量樣品表面的溫度分布;通過在與臨時(shí)熱導(dǎo)體和加熱條件相同的形狀的樣品模型上進(jìn)行傳熱模擬來計(jì)算樣品模型表面的溫度分布。制作回歸模型，其輸入是測(cè)量樣本表面的溫度分布，并且其輸出是測(cè)量樣品的導(dǎo)熱率，通過使用多種組合的計(jì)算結(jié)果的形式的訓(xùn)練數(shù)據(jù)，通過機(jī)器學(xué)習(xí)技術(shù)和溫度從多個(gè)組合獲得的分布;通過將測(cè)量樣本表面的溫度分布的測(cè)量結(jié)果輸入回歸模型來估計(jì)測(cè)量樣品的導(dǎo)熱率。

著錄項(xiàng)

  • 公開/公告號(hào)US2022034829A1

    專利類型

  • 公開/公告日2022-02-03

    原文格式PDF

  • 申請(qǐng)/專利權(quán)人 SUMCO CORPORATION;

    申請(qǐng)/專利號(hào)US201917297080

  • 發(fā)明設(shè)計(jì)人 RYUSUKE YOKOYAMA;TOSHIYUKI FUJIWARA;YUSUKE HIGUCHI;TORU UJIHARA;

    申請(qǐng)日2019-11-18

  • 分類號(hào)G01N25/18;G01N27/18;G06N20;C30B35;C30B15/20;

  • 國家 US

  • 入庫時(shí)間 2024-06-14 22:44:13

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