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首頁> 外文期刊>Microsystem Technologies >Design, fabrication, and test of an on-chip micro flow cytometer with integrated out-of-plane microlenses
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Design, fabrication, and test of an on-chip micro flow cytometer with integrated out-of-plane microlenses

機譯:具有集成平面外微透鏡的片上微流式細胞儀的設(shè)計,制造和測試

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A micro flow cytometer with an integrated three-dimensional hydro-focusing unit and out-of-plane microlenses was successfully fabricated and tested. The entire system was fabricated with SU-8 ultra-violet lithography process. In the hydro-focusing unit, sheath flows pass through a trapezoid-shaped chamber with three 30° slopes to focus the sample flow in both horizontal and vertical directions. As an essential component in the on-chip optical detection system, integrated out-of-plane microlens was embedded in the sidewall of the fluid outlet channel in the detection area. A pre-aligned optical fiber holder was fabricated on chip to fix the output optical fiber in a position aligned to the microlens. Optical simulation and analysis were also conducted using commercial software Zemax. Numerical simulation results confirmed that the use of microlens substantially improved the detection efficiency by focusing the fluorescent light from the sample cells into the output optical fiber. Preliminary cell counting experiment was performed using the fabricated micro flow cytometer system and the experimental results proved the feasibility of the integrated micro flow cytometer design.
機譯:具有集成三維水聚焦單元和平面外微透鏡的微流式細胞儀已成功制造和測試。整個系統(tǒng)采用SU-8紫外線光刻工藝制造。在水聚焦裝置中,鞘流穿過一個具有三個30°斜率的梯形腔,以在水平和垂直方向上聚焦樣品流。作為芯片上光學(xué)檢測系統(tǒng)的必要組件,集成的平面外微透鏡被嵌入檢測區(qū)域中流體出口通道的側(cè)壁。在芯片上制造預(yù)對準的光纖保持器,以將輸出光纖固定在與微透鏡對準的位置。還使用商業(yè)軟件Zemax進行了光學(xué)模擬和分析。數(shù)值模擬結(jié)果證實,微透鏡的使用通過將來自樣品池的熒光聚焦到輸出光纖中,大大提高了檢測效率。使用裝配的微流式細胞儀系統(tǒng)進行了初步的細胞計數(shù)實驗,實驗結(jié)果證明了集成微流式細胞儀設(shè)計的可行性。

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